Laser cooled cesium atoms as a focused ion beam source
1 : Orsay Physics 95 avenue des Monts Auréliens, Fuveau, France
Orsay Physics
FIB (Focused Ion Beam) technology is an essential tool in many elds such
as semi-conductors industry. It can produce an ion beam with an adjustable
diameter (down to 2.5 nm resolution).
Nowadays, FIB technology is based on the LMIS (Liquid Metal Ion Source)
system mainly using the gallium ion. However, the gallium element shows
some drawbacks such as large energy dispersion in the beam and sample
contamination.
Looking for new ion sources is necessary to reduce these disadvantages
and improve the performances. Thus, we proposed to elaborate an ion source
based on ultracold plasma from an atomic beam. The ions will be produced
through an original scheme using the ionization of Rydberg atoms created
near ionization threshold. We expect this ionic beam to be more monochro-
matic and with a larger brilliance at a given energy. Cesium element has been
chosen because of his non contaminating characteristics and for its reactivity
useful in analysis.
This new ion cesium source is developed in Orsay Physics with the colla-
boration of his academic partner Aime Cotton Laboratory.
This presentation will describe the theoretical and experimental principal
of the actual status of this new source.
