Nano aperture ion source
1 : Delft University of Technology - Faculty Applied Sciences , Delft, the Netherlands
We have designed an ion source based on electron impact gas ionization inside a sub-micron sized gas chamber. The gas chamber can be supplied with practically any gas species and will operate at room temperature. Our calculations suggest that we can outperform the state-of-the-art Ga ion source in terms of brightness and energy spread. Experimental work so far included first images and energy spread measurements.
